基于G-M低温制冷机的低温温度计标定系统

Calibration system for cryogenic temperature sensors based on G-M cryocooler

设计和搭建了一套5.2—300K温区的温度计标定系统,以G-M制冷机为冷源,进口已标定温度计为定标源,对Cernox负温度系数温度计、硅二极管温度计、PT100铂电阻温度计等进行了标定,获得了其温度特性曲线并进行对比,分析了标定误差,发现该系统具有较高的标定精度,所标定的温度计在其有效温区内能达到±15mK以内的不确定度,与定标源温度计处于同等量级。

A calibration system for temperature sensors between 5.2K and 300K was established.A G-M cryocooler was used as the cold source and a commercial calibrated temperature sensor was used as the reference.One Cernox NTC temperature sensor,two silicon diode temperature sensors and five PT100 platinum resistance temperature sensors were calibrated.The response curves of these sensors were acquired.The uncertainty of the calibration system for all the above sample sensors was estimated to be within ±15mK in their working range,which is on the same magnitude as the reference sensor.