用于双聚焦磁质谱仪的电子轰击离子源的设计与研究

Design and research of the electron bombardment ion source for double focusing magnetic mass spectrometer

本文设计了一种用于双聚焦磁质谱仪的电子轰击离子源,运用静电透镜软件simion的仿真模拟研究了它的离子光学系统,研究了离子光学系统电压参数和离子束的初始半散角对拉出离子效率和离子束宽度的影响。

In this sparer, we designed an electron bombardment ion source for double focu- sing magnetic mass spectrometer, as well as the ion optical system. Through the simulation stud- y by the electrostatic lens software simion, the principle of the ion optical system were re- searched. By changing the voltage parameters of the ion source, the study of the structure of dif- ferent types of ion sources and change the initial half divergence angle of the sample ions, the simulation study on the performance of the ion source, played a certain role in guiding the actual instrument assembly debugging.