摘要
文章介绍了TFT-LCD生产中,液晶滴下(One Drop Filling,ODF)所涉及真空贴合系统(Vacuum Align System,VAS)的结构及其发展情况,概述了VAS的工艺过程,重点介绍了该系统中真空单元、基板吸附单元和基板对位单元及其发展。
This paper showed the research and development of Vacuum Assembly System （VAS） in ODF process. Introduced the process of VAS and discussed the vacuum system, chuck system, precise alignment system and the development direction.
出处
《现代显示》
2012年第11期34-37,共4页
Advanced Display
