电子探针高压束流线路分析

High-pressure Beam Line Analysis of the Electron Probe

本文以50 A线路为例,详细分析电子探针高压束流部分电路的工作原理及电子束高压、电流的控制过程,为此部分电路的维修保养提供了可靠的依据。

This 50 A circuit for example, a detailed analysis of the working principle of the part of the circuit of the high - voltage electron probe beam and electron beam high pressure, the current control process to provide a reliable basis for the maintenance of this part of the circuit.