用于光刻投影物镜微调的压电陶瓷驱动器设计

Design of Piezoelectric Ceramic Driving Power Supply for Fine-tuning of Lithography Projection Lens

为了提高大数值孔径投影物镜成像质量,需对镜片进行高精度微调。压电陶瓷是一种高精度定位的执行元件。根据电压控制型压电陶瓷驱动电源的原理,利用运算放大器PA88和OPA2227构成的高压运放式复合放大电路,设计了一种高精度的压电陶瓷驱动器,用于驱动镜片的精密微调。详细阐述了驱动器和供电电源的设计原理,并运用Multisim10软件对该驱动器的输出电压、线性度、静态纹波及稳定性进行了仿真分析。结果表明,该驱动器具有输出精度高,最大非线性误差为0.000 5%,静态纹波小(±100nV),稳定性强等优点,达到了投影物镜中镜片微调要求。

In order to improve the imaging quality of large numerical aperture projection lens, the high-precision fine-tuning for lens was required. The piezoelectric ceramic is a kind of high-precision positioning actuator. According to the principle of the voltage-controlled piezoelectric ceramic driving power, a high-precision piezoelectric ceramic driving power for precision fine-tuning of the lens has been designed by using the high-voltage operational amplifier circuit consisting of operational amplifier PA88 and OPA2227. The design principles of the driving power supply and power supply were described in detail. The output voltage,linearity, static ripple and stability were simulated and analyzed rasing Multisiml0 software. The results showed that the driving power had the advantages of high-precision, maximum non-linearity error of 0. 000 5 %, small static-ripple（土 100 nV） and strong-stability, which reached the requirements for lens fine-tuning.