摘要
Surface-plasmon （SP） enhancement of amorphous-silicon-nitride （a-SiNx） light emission with single-layer gold （Au） waveguides is experimentally demonstrated through time-resolved photoluminescence measure- ment. The a-SiN~ active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and ricated by magnetron sputtering. The maximum the Au waveguide on the top of the a-SiNx layer is lab- Purcell factor value of -3 is achieved with identified SP resonance of the Au waveguide at -530 nm.
Surface-plasmon （SP） enhancement of amorphous-silicon-nitride （a-SiNx） light emission with single-layer gold （Au） waveguides is experimentally demonstrated through time-resolved photoluminescence measure- ment. The a-SiN~ active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and ricated by magnetron sputtering. The maximum the Au waveguide on the top of the a-SiNx layer is lab- Purcell factor value of -3 is achieved with identified SP resonance of the Au waveguide at -530 nm.
基金
supported by the National Basic Research Program of China(Nos.2011CBA00608 and 2011CBA00303)
the National Natural Science Foundation of China(Nos.61036011 and 61036010)
