摘要
MEMS惯性传感器作为工业应用领用新兴的应用元件,不论在商业、工业还是军工应用上都有着广阔的应用。文中给出了几种MEMS的在不同领域内的应用范例,并解析了相应的原理,并从一款较常用的MEMS入手提出了对相应领域内的解决思路。
MEMS inertial sensors as emerging application components for industrial applications led, whether commercial, industrial or military applications have broad application space.Article gives several examples of application in various areas of MEMS, and resolve the appropriate principles, and start with a common MEMS presents appropriate solutions in the area.
出处
《电子设计工程》
2013年第3期76-78,共3页
Electronic Design Engineering
关键词
MEMS传感器
运动补偿
精度要求
交叉灵敏度
MEMS sensors
motion compensation
accuracy requirements
cross sensitivity
