激光点阵光刻机控制系统的硬件设计

Hardware Design of Control System for Laser Dot Matrix Lithography

为了制作大尺寸的激光防伪商标,开发了高速激光点阵光刻机。该光刻机以工业控制计算机为上位机,以ARMLPC2138和单片机STC12C5410AD为下位机,采用直线电机直接驱动X-Y工作台,实现了高速高精度定位。动态曝光的工作方式,克服了传统光刻机工作速度慢的静态曝光工作模式,使光刻工作速度提高了10～12倍,解决了大尺寸防伪商标制作困难的问题,有效提高了全息母板制作的效率。

In order to produce large size laser anti-counterfeiting trade marks, a machire of high speed laser dot matrix lithogra- phy was developed. The lithography machines used Industrial Personal Computer （IPC） as upper-computer and with ARM LPC2138 and Micro Controller Unit （MCU） STC12C5410AD as lower computer, and X-Y table driven directly with linear motor, the high speed and high precision positioning were achieved. By dynamic exposure working method, the slow traditional working model of static exposure lithography was overcome, and the working speed of lithography was 10 ~ 12 times faster. The problem of difficult to make anti-counterfeiting trade marks with large size is solved, which effectively improve the efficiency i~ the production of holographic master plate.