摘要
Ti 注入钢的射程参数(1~1000keV)是用 TRIM87程序计算而得到的.考虑到高注量注入溅射效应的影响,利用 Schuilz 模型计算了 Ti 注入钢和 Al 中浓度分布.对此模型中饱和注量与离子射程的关系提出了修正.给出了表面浓度与射程关系表示式.为了提高注入效率,节省注入时间,利用这些修正式能方便地给出饱和注量和注入元素浓度分布.计算结果与低温下注入的实验结果相符合,而与加温(400℃)注入的实验结果偏离较大.也考虑了注入合金择优溅射和注入效率的问题.
The parameter calculations of range are carried out using TRIM87 program.The results are given.The Ti concentration distribution are given using Schuilz model taking account into sputtering.Specially,the rela- tions of saturation retaining dose in steel on ion energy and equation of surface concentration are given.The model is improved.The covenient equa- tion of retaining dose calculation is obtained.The results are agree with Reynolds experimemts.The sputtering of a binary compound is considered for the calculation.The total sputtering coebbicionr is obtained for separate sputtering eoebbicients.The calculation of implantation efficiency is shown also.
出处
《北京师范大学学报(自然科学版)》
CAS
CSCD
1991年第3期301-307,共7页
Journal of Beijing Normal University(Natural Science)
基金
国家"863计划"资助项目
关键词
离子注入
钛
溅射
浓度分布
钢
Ti implantation
H13 steel
calculation of range
concentration distrabution
sputtering
binary sputtering