摘要
探讨了离子注入中的温升问题.这种温升可用试验方法进行测量.研究了几种测温方法(例如低熔点金属法和硬度法).分析了降低注入样品温升的一些途径.
The problems of temperature rise in ion implantation are discussed.This temperature rise can be measured by experimental methods. Some kinds of measurement methods related to the temperature rise,such as low melting point metals method and hardness method,are studied.Many ways of reducing temperature rise in implanted samples are analysed.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
1991年第3期291-295,共5页
Journal of Beijing Normal University(Natural Science)
关键词
离子注入
热效应
温度
测量
硬度法
ion implantation
thermal effect
temperature rise
measurement
hardness method
