多晶硅生产中废气的处理

Discuss on treatment of off gas in polysilicon production

为解决多晶硅生产过程中的环境污染和能耗问题,需对生产中的废气进行无害化处理。介绍了改良西门子生产工艺及废气传统处理方式,重点探讨了废气焚烧工艺,给出了废气焚烧工艺的特点、原理、流程、副产品及用途。废气焚烧工艺不仅可降低处理成本,将对环境的影响降至最低,还能够回收副产物,产生一定的经济效益。

In order to solve the problem of environmental pollution and energy consumption in the polysilicon production process, effective and complete treatment of off gas is needed. The optimized Siemens process and traditional off gas treatment process are introduced. The off gas incineration process is highlighted. The characteristics of the waste gas incineration process, principles, processes, by-products and application are given as well. The off gas incineration process not only reduces the cost of processing and minimizes the impact to the environment, but also can recycle byproducts and produce some economic benefits.