压缩空气微波等离子体发射光谱的实验研究

Experimental Study on Spectra of Compressed Air Microwave Plasma

利用微波等离子体发生装置,以压缩空气为工作气体,在1～5atm气压下激发了微波等离子体。使用光谱测量系统,对不同气压和不同入射微波功率情况下的压缩空气微波等离子体的发射光谱进行了实验研究。结果显示,在其他条件不变时,随着气压升高,压缩空气微波等离子体的带状连续谱特征逐渐减弱;随着入射微波功率降低,带状连续谱强度逐渐减弱而带状连续谱特征依然显著。实验结果为了解压缩空气微波等离子体的光谱特性和NO活性基团的产生条件提供了实验依据。

Using a microwave plasma generator,compressed air microwave plasma was excited under 1~5 atm pressures.Under different pressures and different incident microwave power,the emission spectra of compressed air microwave plasma were studied with a spectra measuring system.The results show that continuum is significant at atmospheric pressure and the characteristic will be weakened as the pressure increases.The band spectra intensity will be reduced with the falling of the incident microwave power and the band spectra were still significant.The experimental results are valuable to studying the characteristics of compressed air microwave plasma and the generating conditions of NO active groups.