摘要
介绍了波长编码型光学位移传感器的输出光的特点及目前利用光谱仪进行解调的制约因素,分析了色敏元件的工作原理及色敏元件对传感器输出窄带光进行解调的可行性,设计了色敏解调线路并对行程±60mm的光位移传感器进行了测试验证,测得色敏解调方案对传感器的测试精度可以达到±0.37%F.S,且可以达到600Hz以上的高动态解调。
The output characteristics of wavelength encoded optic displacement sensors and disadvantages of the demodulation method based on spectrometers are presented. The principle of colour sensors and the demodulation feasibility of colour sensors on the output narrow band light are discussed. A PCB for demodulation is designed and a displacement sensor with the scale of ±60 mm is tested, the accuracy of which is ~0.37%F. S, and a high dynamic demodulation of 600 Hz is achieved.
出处
《半导体光电》
CAS
CSCD
北大核心
2013年第1期137-140,共4页
Semiconductor Optoelectronics
基金
中航工业创新基金项目(2009D61864)
关键词
色敏元件
波长编码
高动态解调
colour sensors
wavelength encoded
high dynamic demodulation
