一种新型三氯氢硅合成流化床工艺

A new type of fluidized bed process for synthesis of trichlorosilane

介绍一种高效高产合成三氯氢硅合的流化床及配套工艺。采用该工艺原料转化率达95%,产品质量分数达99.99%;生产1 t三氯氢硅主要消耗如下:硅粉≤255 kg,蒸汽≤250 kg、氯气≤930 kg、氢气≤170 m3。

A kind of fluidized bed and its matching process for synthesis of trichlorosilane in high efficiency and in high yield are introduced. In the process, the conversion rate of raw materials reaches 95% and the purity of product reaches 99.99% （wt.）. The main consumption in production of 1 t trichlorosilane is that silicon powder not greater than 255 kg, steam not greater than 250 kg, chlorine not greater than 930 kg, and hydrogen not greater than 170 m^3.