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Phase Composition of Sputtered Film from a Mixture Target of Hydroxyapatite and Strontium-apatite

Phase Composition of Sputtered Film from a Mixture Target of Hydroxyapatite and Strontium-apatite
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摘要 To obtain an Sr-substituted hydroxyapatite thin film, sputter-coating was performed on a cellulose filter acting as a substrate from the mixture target of hydroxyapatite (HA) and strontium-apatite (SrAp) at an Ar pressure of 0.5-5.0 Pa. The ratio of the SrAp in the mixture target was varied from 25% to 100%. After coating, the films were heated at 700 ℃ to remove the cellulose filter substrate, and the crystalline phases were identified by X-ray diffraction (XRD). The sputter-coated film was identified as the Sr-substituted /3-tri-calcium phosphate (TCP) and the Sr-substituted/3-calcium pyrophosphate (CPP) as well as the Sr-substituted HA. The weight ratio of the Sr-substituted HA decreased with increasing Ar pressure or with an increasing ratio of SrAp to HA in the target. The average Sr/(Ca + Sr) molar ratio in the film was 1.9%-3.5% slightly lower than the initial SrAp ratio of the target, and the ratio was not influenced by the Ar pressure. In the (Sr + Ca)/P ratio, the ratio decreased while increasing the SrAp ratio in the target. To obtain an Sr-substituted hydroxyapatite thin film, sputter-coating was performed on a cellulose filter acting as a substrate from the mixture target of hydroxyapatite (HA) and strontium-apatite (SrAp) at an Ar pressure of 0.5-5.0 Pa. The ratio of the SrAp in the mixture target was varied from 25% to 100%. After coating, the films were heated at 700 ℃ to remove the cellulose filter substrate, and the crystalline phases were identified by X-ray diffraction (XRD). The sputter-coated film was identified as the Sr-substituted /3-tri-calcium phosphate (TCP) and the Sr-substituted/3-calcium pyrophosphate (CPP) as well as the Sr-substituted HA. The weight ratio of the Sr-substituted HA decreased with increasing Ar pressure or with an increasing ratio of SrAp to HA in the target. The average Sr/(Ca + Sr) molar ratio in the film was 1.9%-3.5% slightly lower than the initial SrAp ratio of the target, and the ratio was not influenced by the Ar pressure. In the (Sr + Ca)/P ratio, the ratio decreased while increasing the SrAp ratio in the target.
出处 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2013年第1期1-6,共6页 材料科学技术(英文版)
基金 partially supported by the Japan Scienceand Technology Agency, A-STEP (AS232Z01193F)
关键词 SPUTTERING HYDROXYAPATITE STRONTIUM Strontium-apatite Crystal phase Sputtering Hydroxyapatite Strontium Strontium-apatite Crystal phase
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