梯度Ti_(1-x)Al_xN膜层的的制备与工艺性能

Preparation and Technological Properties of Gradient Ti_(1-x)Al_xN Film

采用多弧离子镀技术交互沉积工艺,使用合金靶与纯Ti靶在齿轮材料40Cr基体表面实现梯度Ti1-xAlxN膜层的制备,通过研究不同x值时梯度Ti1-xAlxN膜层的表面形貌、组织结构及膜层显微硬度、结合力等性能,探求较优的工艺参数配比。结果表明,在工艺参数相同的条件下,不同x值,梯度Ti1-xAlxN膜层厚度相差不大;显微硬度先随x值的增大而先增大后降低;结合力随x值的增大而降低,x值为0.67时梯度Ti1-xAlxN膜层综合性能最优。

By using pure Ti and Ti-A1 alloy as target materials in the multiple arc ion plate interactive deposition technology, gradient Ti1-xAlxN film was prepared on gear material 40Cr. The surface, structure, microhardness and binding force under different x figure were analyzed to acquire better processing parameters and their proportion. The results indicate that under the same processing parameters, there is not much difference on the thickness of gradient Ti1-xAlxN film with different x figure. With the increase of x figure however, the microhardness first increases and then decreases but the binding force simply reduces. The best combination property of gradient Ti1-xAlxN film could be obtained when x is 0.67.