摘要
Effects of growth temperature on the structural and electrical properties of Li-N-H codoped ZnO thin films grown by DC reactive magnetron sputtering were investigated. Scanning electron microscopy and X-ray diffraction results showed that increasing growth temperature could improve the crystalline quality. But Hall measurement results showed that growth temperature had a nonlinear influence on the electrical property. The variation of electrical properties with the growth temperature was found to be related to the activated concentration of N in ZnO and the evaporation of Li during the growth process, derived from the Hall measurement and the second ion mass spectroscopy measurement.
Effects of growth temperature on the structural and electrical properties of Li-N-H codoped ZnO thin films grown by DC reactive magnetron sputtering were investigated. Scanning electron microscopy and X-ray diffraction results showed that increasing growth temperature could improve the crystalline quality. But Hall measurement results showed that growth temperature had a nonlinear influence on the electrical property. The variation of electrical properties with the growth temperature was found to be related to the activated concentration of N in ZnO and the evaporation of Li during the growth process, derived from the Hall measurement and the second ion mass spectroscopy measurement.
基金
supported by the National Basic Research Program of China under Grant No.2006CB604906
the National Natural Science Foundation of China under Grant No.51072181
the Doctoral Fund of Ministry of Education of China under Grant No.20060335087
