摘要
含氟电子气体在半导体/电子工业中主要用作清洗剂和蚀刻剂。综述了含氟电子气体品种、性能及其研究进展,指出研究方向与新一代含氟电子气体,以供同仁参考。
Fluorinated electronic gases were mainly used in semiconductor/electrical industry. In this paper, the state of art of the fluorinated electronic gases was stated, including the different variety and performance. The research interests in future and the new kind of fluorinated electronic gases were pointed out.
出处
《低温与特气》
CAS
2013年第1期1-5,共5页
Low Temperature and Specialty Gases
关键词
电子气体
清洗剂
氟化工
半导体
electronic gas
etching
cleaning
fluorine chemical industry
semiconductor
