一种基于Pd-Y合金纳米膜的光纤H_2传感器

A kind of optical fiber H_2 sensor based on Pd-Y alloy nano-film

为提高光纤H2传感器的响应速度、稳定性和可重复性,本文分析了Pd-H传感机理,进而提出利用双靶溅射工艺在石英光学玻璃基底上制备55nm厚的Pd-Y合金H2敏薄膜,采用双光路检测技术设计并实现了反射式光纤束H2传感器系统。通、放H2实验结果表明,本文研制的基于Pd-Y合金纳米薄膜的传感器具有响应快速的特点,特别是在多次循环老化实验后表现出良好的稳定性和可重复性。

In order to obtain a high sensitivity and stability to hydrogen, an optical fiber sensor based on palladium-yttrium （PdY） allog nano-film is designed and fabricated in this paper. A cleaning process was used to wash a substrate of quartz glass and targets to obtaine good binding performance between film and basement. The 55 nm thick PdY film was deposited on the substrate by the double-target reactive magnetron co-sputterng,in which the atom content of yttrium is 10%. And a 5 nm-thick pure palladium protective layer was deposited on the film at last to prevent it from oxidation. The reflective optical fiber bundle sensor system with a single light source and double light paths was designed and realized. The information containing hydrogen concentration was extracted through a division operation between the testing light path and the reference one. This sensor system was tested by standard gas and dry air. The results show that it exhibits long time stability to dry air and has response time of 343 s,266 s and 187 s to 1.5 %, 3.0 % and 4. 0 % hydrogen, respectively. Although the sensor has zero drift to the standard gas at different degrees, it shows strong stability and repeatability in response value and increment of zero after three or four cycles of test.