负载分压式大功率超声波电源频率跟踪研究

Frequency Tracing for Large Power Ultrasonic Supply with Load Voltage-shared Mode

针对负载分压式反馈大功率超声波电源的频率漂移问题,基于数字单片机,利用控制外加数字电感方式实现大功率超声波电源频率自动跟踪和功率恒定。实验结果表明,这种频率跟踪方式具有较高的可靠性和良好的动态调节性能,可用于频率漂移大的场合。

Aimed at frequency drift problem for large power uhrasonic supply with load voltage - shared mode, frequency automatic tracing and power constant was realized with the addition of digital inductance mode based on digital microcontroller. The experimental results show this frequency tracing way has high reliability and better dynamic adjustment property. It can be applied in situation with larger frequency drift.