摘要
高纯硅烷主要用于电子和半导体行业中,是一系列含硅化合物的基本原料。概述了硅烷的纯化技术和分析方法。纯化技术有吸附法、冷冻法、精馏法;检测分析方法包括DID、PDHID气相色谱分析仪和气相色谱—质谱联用分析仪。
High purity silane was mainly used for electronic and semiconductor industry, which was a series of basic raw materials of silicone - containing compound. The purification technology and analysis method of silane were summa- rized. Purification technology included adsorption method, freezing method, and distillation method. Detection analysis method included DID, PDHID gas chromatographic analyzer and chromatography -mass spectrometry analyzer.
出处
《广州化工》
CAS
2013年第5期43-46,共4页
GuangZhou Chemical Industry
关键词
硅烷
纯化技术
检测
分析
silane
purification technology
detection
analysis
