摘要
多晶硅薄膜晶体管目前是大面积微电子学领域中最热门的研究课题之一 ,它以其独特的优点 ,在液晶显示领域中扮演着重要角色。简要介绍了多晶硅薄膜晶体管的结构、器件特性以及在有源矩阵液晶显示器中的应用。
At present, polycrystalline silicon thin film transistor has been the most popular subject in the field of large area electronics, and has played a dominant role in the area of liquid display. In this paper, the structure, properties of polycrystalline silicon thin film transistor were explained, and its application in the active matrix liquid display device was described.
关键词
多晶硅
薄膜晶体管
液晶显示器
AMLCD
polycrystalline silicon
thin film transistor
active matrix
liquid crystal display (L