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多晶硅TFT及其在AMLCD中的应用 被引量:3

Poly-Si TFT and Its Application in AMLCD
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摘要 多晶硅薄膜晶体管目前是大面积微电子学领域中最热门的研究课题之一 ,它以其独特的优点 ,在液晶显示领域中扮演着重要角色。简要介绍了多晶硅薄膜晶体管的结构、器件特性以及在有源矩阵液晶显示器中的应用。 At present, polycrystalline silicon thin film transistor has been the most popular subject in the field of large area electronics, and has played a dominant role in the area of liquid display. In this paper, the structure, properties of polycrystalline silicon thin film transistor were explained, and its application in the active matrix liquid display device was described.
出处 《半导体杂志》 2000年第4期46-50,共5页
关键词 多晶硅 薄膜晶体管 液晶显示器 AMLCD polycrystalline silicon thin film transistor active matrix liquid crystal display (L
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参考文献6

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同被引文献18

  • 1王玉如.液晶显示技术的最新进展[J].现代电子技术,2004,27(22):85-87. 被引量:10
  • 2齐丙丽,欧谷平.有机电致发光器件退化机理的研究[J].光子技术,2004(4):197-203. 被引量:4
  • 3袁涛,陈炳若.有机薄膜晶体管研究进展[J].飞通光电子技术,2002,2(2):86-90. 被引量:4
  • 4许洪华,徐征,黄金昭,袁广才,孙小斌,陈跃宁.薄膜晶体管研究进展[J].光子技术,2006(3):135-139. 被引量:6
  • 5Meng Z G, Zhao S Y, Wu C Y, et al. Polycrystalline Silicon Films and Thin-Film Transistors Using Solution-Based Metal-Induced Crystallization [J]. JOURNAL OF DISPLAY TECHNOLOGY, 2006, 2 (3): 265-267.
  • 6Zhang D L, Wong M. Three-Mask Polycrystalline Silicon TFT With Metallic Gate and Junctions [J]. IEEE ELECTRON DEVlCELETTERS, 2006, 27(7): 564-565.
  • 7Bae H S,Yoon M H,Kim J H,et al.Photodetecting properties of ZnO-based thin-film transistors.Appl Phys Lett,2003,83(25):5313
  • 8Kwon Y,Li Y,Heo Y W,et al.Enhancement-mode thin-film field-effect transistor using phosphorus-doped (Zn,Mg)O channel.Appl Phys Lett,2004,84 (14):2685
  • 9Muthukumar S,Gorla C R,Emanetoglu N W,et al.Control of morphology and orientation of ZnO thin films grown on SiO2/Si substrates.J Cryst Growth,2001,225(2~4):197
  • 10Carcia P F,McLean R S,Reilly M H,et al.Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering.Appl Phys Lett,2003,82(7):1117

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