摘要
大行程微动工作台是微细加工设备的重要组成部分 ,针对当前微动工作台行程小 ,或行程较大而其检测控制复杂等不足 ,提出了一种“双足式移动”的新原理 ,并研制了一台双足式大行程微动工作台。该工作台由两套进给和支承微位移器来实现进给和支承。在研究中 ,提出了一套检测控制系统 ,可对工作台的移动位移大小和方向进行实时控制 ,这种检测控制系统可以使工作台按照任意的路径进给。该工作台还具有很多优点 :比如分辨率高、无导轨、无摩擦、运动平稳、承载能力高、控制简单等。
Microfeed table with long stroke is the important component in microfabrication equipment.But,presently microfeed table scale is small or the measure and control system is complex.This paper presents a new method to drive a microfeed table for microfabrication by utilizing piezoelectric actuators,which is based on a new principle of 'two?leg moving drive”.The table is supported and driven by two pairs of the feed and support actuators. A control algorithm is also proposed in the present research so that the feed velocity and direction can be control in real time. The simple control algorithm automatically generates the complicated voltage patterns to be applied to the actuators to generate any given motion. The microfeed table for microfabrication is expected to have various advantages such as high positioning resolution, without guide, without friction, smooth motion, high loading capacity, simple control strategy etc.
出处
《微细加工技术》
2000年第4期68-72,76,共6页
Microfabrication Technology
基金
国家自然科学基金!( 595712 63)
霍英东基金资助项目
