摘要
介绍了一种用于纳米磨削的新型微位移系统 ,该系统由压电陶瓷微位移工作台和计算机控制的专用驱动电源组成 ,系统精度与压电陶瓷致动器和控制系统密切相关 .阐述了以压电陶瓷致动器为核心的微位移工作台和驱动电源的设计原理和设计特点 。
This paper introduces a nanometer grade micro displacement system suitable for ultraprecision grinding.It consists of a table driven by a piezoelectric ceramic actuator and a special driving power controlled by a computer.The systematic accuracy bears a relation to the actuator and driving power.The paper describes the design principle,the characteristics of the piezoelectric ceramic actuator and driving power,and then realizes nanometer mirror grinding of engineering ceramic samples using the high precision micro displacement system developed.
出处
《天津大学学报(自然科学与工程技术版)》
EI
CAS
CSCD
2000年第4期537-540,共4页
Journal of Tianjin University:Science and Technology
基金
国家自然科学基金资助项目 !( 599750 6 9)
天津大学纳米中心课题
关键词
纳米级
压电陶瓷
微位移系统
超精密加工
nanometer grade
piezoelectric ceramics
micro displacement system