硅化镁制备单硅烷的工艺研究

Study on Preparation of Monosilane from Magnesium Silicide

提供一种硅化镁制备单硅烷的方法,并对制备工艺进行了研究,得到的优化工艺条件为:氯化铵和硅化镁的摩尔比为8∶1,液氨含水量<10-5,氯化铵液氨溶液浓度为20%,反应时间3 h,反应温度-20℃,单硅烷的收率大于95%。

Provides a method for preparing monosilane from magnesium silicide, and studies the preparation process. The optimum process conditions are as follows： the molar ratio of ammonium chloride to magnesium silicide is 8 ：1, the water content of ammonia is less than 10-5, the ammonia concentration is 20%, and reacts for 3 h at -20 ℃. Under above conditions, the yield of monosilane exceeds 95%.