支承硅微谐振器的弹性系统分析

The elastic systems analysis of guiding Microresonant-Structure

对支承硅微谐振器的两种弹性系统———直脚型和蟹脚型结构进行了全面的力学分析 ,给出了应力、位移及弹性常数等力学参量的计算方法 ,对两种结构进行了比较 ,并对蟹脚型结构进行了优化设计 ,优化后的结构其应力位移比值σmax/x的最小值可达2 .594MPa/μm

Mechanical analysis of two type elastic systems named crab leg flexure and straight leg fle xure, which supporting Microresonant Structure is presented. Stress, deflection and flexural spring constant formulae of the two type systems are derived. An optimal design theory for each flexure is developed in which the objective is to obtain the greatest deflection per unit of allowable material stress. In accordance with this optimal design theory, the stress displacement ratio of ′crab-leg′ structure calculated to be as low as 2.594MPa/μm.