Al/Al_2O_3/Cu测控温薄膜材料的制备

Preparation of Al/Al_2O_3/Cu measuring and controlling temperature thin film material

针对液浮陀螺仪悬浮液的应用环境,设计出Al/Al_2O_3/Cu测控温材料。采用阳极氧化的方法在草酸与冰乙酸组成的电解液中制备了阳极氧化膜绝缘层,并采用磁控溅射的方法制备了温度敏感层。利用扫描电镜、原子力显微镜和光学显微镜等研究了阳极氧化膜和铜膜的表面形貌,采用绝缘电阻测试仪测试阳极氧化膜的绝缘性能。结果表明,阳极氧化工艺对阳极氧化膜的绝缘性能以及热处理过程中的开裂行为都有一定影响。电流密度为1.0～1.5 A/dm^2,冰乙酸浓度为0.1～0.3 mol/L,阳极氧化时间在30～60 min条件下制备的氧化膜绝缘性能和抗开裂性能满足Al/Al_2O_3/Cu绝缘层要求。以该氧化膜为衬底制备铜膜刻蚀后可得到连续的电阻条。

Al/Al2O3//Cu measuring and controlling material was designed according to the application environment of suspension in the liquid floated gyroscope. Anodizing teehnology was used to prepare the insulating layer in the oxalie acid and aeetic acid elec- trolytes. A temperature-sensitive layer was deposited by magnetron sputtering. The morphologies of the anodic film and Cu film were investigated using scanning electron microscope （SEM）, atomic foree microscope （AFM） and optical microscope （OM）. In- sulating properties were tested by megohmmeter. The results showed that the insulating properties and the crack behavior are in- fluenced by the anodizing conditions during the heating of the anodic film. The insulating properties and crack resistance during heating of the anodie film formed in 0. 3 mol/L oxalic acid and 0. 1--0. 3 mol/L acetic acid electrolytes, current density J = 1.0 -- 1.5 A/dm2, anodizing time t = 30--60 min can satisfy the need of Al/Al2O3/Cu as the insulating layer. The Cu film on these anodic films could be made for available resistance pattern by etching.