掺锡氧化铟薄膜应用于电热玻璃

Application of Indium-Tin Oxide Film onto Electro-Heating Glass

用直流磁控反应溅射技术,在玻璃表面淀积掺锡氧化铟透明导电薄膜(简称ITO膜),成功地应用到飞机、机车、船舶等电热玻璃上.该技术的研究成功,为我国电热玻璃的更新换代闯出了新的途径.本文介绍了ITO薄膜的特性、导电原理及其制备方法,对关键工艺参数进行较详细地讨论.实验结果表明,以ITO膜为导电材料制备的电热玻璃,克服了以往电热玻璃所有缺点.并且,还具有独特的光学性能,既可节省能源,又对驾驶员的身心健康起到了保护作用.

With the technique of DC magnetron catbode sputtering a transparent conductive film of indium-tin oxide (ITO) can be deposited onto the glass substrate, which is used for the electric hearing glass of the planes, locomotives, ships etc, The producing the new type of electric heating glass in China. This paper described the features, conductive principal and the preparing method for the ITO film. Also the critical technical parameters were detailed. The experimental results showed this eleetric heating glass with ITO film as the conductive material eliminated the disadvantages of the old ones, In addition, its optical performance can save energy and be beneficial to the drivers' health as well.