CVI反应器气体流动可视化发烟系统

A smoke generator for use in fluid flow visualization in CVI reactors

CVI反应器内气体的输运对基体的沉积速度与沉积质量有重要的影响。本文介绍了一种基于 Ti Cl4 与 H2 O反应产生 Ti O2 烟雾而设计的发烟系统 ,能使模拟 CVI反应器内复杂的与不可观察的气体流动现象可视化。该系统结构简单 ,可操作性强 ,形成的烟流总流量与密度可调且长时间可视、均匀。流场照片表明其发烟效果很好 ,能满足 CVI反应器内气体流场的显示研究。

The effect of fluid flow in the CVI reactors on the deposition velocity and quality is very important. The visualization of perplexing and invisual fluid flow phenomenon in simulation CVI reactor can be realized using the smoke generator based on forming TiO 2 by reaction between TiCl 4 and H 2O. The smoke generation system fulfills these requirements, adjustable rate and density, long time visualization of highly turbulent flow and uniformity of smoke while preserving simplicity of construction and operation. The flow field photographs demonstrate the effectiveness of the smoke generator, and the color, density and quantity of the smoke are very good for application to flow visualization studies for CVI reactors.