摘要
为了满足特殊的标定需求,保证四路正交激光标定线光学一致性,分析了利用单一光源形成四路十字形激光的成形原理,提出了利用柱面镜形成线光源结合分光棱镜多次分光和组合的方法,实现了单光源输出四向正交的激光十字形标定线,设计了实现激光平行光输入的准直物镜,分析了输出的十字形激光特征,采用模块化的设计思想完成了光学元件支撑结构设计和装调,并进行了主要指标的测试。测试表明,四路十字形激光的相互正交精度优于40″,单路激光十字线长度在(50.1±0.1)mm范围内,激光十字线的照度均匀,峰值半宽在0.1~0.2 mm之间,可以满足高精度的测量及标定要求。
In order to meet the special calibration requirements and ensure the uniformity of four orthogonal laser lines, the forming principle of the cross laser lines in four directions using a single laser source is analyzed ; and a new method is proposed, which uses cylindrical mirrors to form laser line and uses beam splitter prism to split and combine the rays. The orthogonal cross laser calibration lines in four directions were achieved from single laser source;the collimating lens was designed, which achieves parallel laser input;and the characteristic of output cross laser was analyzed. The design and alignment of the optical element support structures were implemented with modularized design, and the important parameters of this instrument were tested. The test results show that the orthogonal errors of the cross lasers in four directions are better than 40", the lengt of cross laser line is in the range of (50.1 ± 0. 1 ) ram, the illuminations of the laser cross lines are uniform,the half width of the laser peak is between 0. 1 - 0.2 mm. The performance of the device can meet the high accuracy measurement and calibration requirement.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2013年第3期691-697,共7页
Chinese Journal of Scientific Instrument
基金
国家高技术研究发展计划(863计划)(2012AA121505)资助项目
关键词
十字形激光
单激光源
正交
cross laser
single laser source
orthogonal