压阻式微压力传感器结构参数设计

Design of the Structural Parameters for Piezoresistive Micro Pressure Sensor

在研究压阻式微压力传感器的结构参数的基础上,根据传感器的灵敏度与线性度特点,设计了一种量程为200 kPa的微压力传感器。在满足计算要求的条件下,对该传感器的每一个参数进行ANSYS仿真;并根据灵敏度、线性度及制作工艺的难易程度选择这些参数的最佳值。仿真结果表明,该设计方法对微压力传感器的研制具有一定的参考价值。

Based on the structural parameters of the piezoresistive micro pressure sensor, according to the sensitivity and linearity of the sensor, the micro pressure sensor with 200 kPa range is designed. Under the condition of meeting the calculating requirements, each parameter is simulated by ANSYS, and the optimum values of these parameters are selected in accordance with the sensitivity, linearity and the degree of difficulty for fabricating process. The results of the simulation show that the design method possesses a certain reference value for researching and manufacturinz micro pressure sensors.