石英振梁加速度计谐振器的结构设计

Structure design of quartz vibrating beam accelerometer resonator

石英谐振器的设计是实现高精度石英振梁加速度计的关键。首先对石英晶体的最优切型切角结构进行研究,确定石英晶体的最优切型切角为(xyt)5°。其次,理论分析并通过仿真验证了石英谐振器的结构参数对石英振梁加速度计标度因数的影响,并对石英谐振器的结构参数进行了优化。最后,对石英谐振器进行了模态仿真,并分析了石英谐振器的尺寸制作偏差对标度因数的影响。用有限元分析方法得到了石英谐振器的理想振型,且石英振梁加速度计的标度因数为40 Hz/g。理论及仿真结果表明该石英谐振器可应用于高标度因数石英振梁加速度计中。

Design of quartz resonator is the key to realize the high-precision quartz vibrating beam accelerometer.First,the optimal cut type and cut angle of（xyt）5° was determined by theoretical analyses.Next,based on the relationships between the structural parameters of quartz resonator and the sensitivity of quartz vibrating beam accelerometer obtained by the theoretical analyses,the structure parameters of quartz resonator were optimized and verified by finite element analysis.Finally,the vibration modes of quartz resonator were simulated,and the simulation models were employed to study the influences of the fabrication deviations on the sensitivity of the accelerometer.Results of finite element analysis show that the quartz resonator is predicted to vibrate in an ideal mode and enables the accelerometer＇s scale factor be at 40 Hz/g.These results show that the optimized quartz resonator could be used in high-precision quartz vibrating beam accelerometer.