可见光域叠层成像中照明光束的关键参量研究

Research on the key parameters of illuminating beam for imaging via ptychography in visible light band

研究了可见光域叠层成像中照明光束的系列关键参量对成像质量的影响.利用叠层成像迭代恢复算法,通过模拟实验研究了照明光束的交叠率、光束尺寸以及几何形状对成像恢复质量的相互制约关系.模拟结果表明,光束的交叠率是影响成像恢复质量的主要因素,光束的形状主要影响成像的收敛速度,而光束尺寸对成像的恢复质量以及收敛速度直接影响较小.因此,通过模拟可以对可见光域、X射线以及电子波段等其他波段的实验进行系统优化照明光束参数起到一定的理论指导作用.

Some key parameters of illuminating beam and the influence on imaging quality are investigated via ptychography in visible light band. The influences of overlap ratio, size and shape of illuminating beam on imaging quality and their relationship are studied using ptychographical iterative engine algorithm. The simulation results show that the overlap ratio of illuminating beam is a main factor influencing imaging quality. Shape of illuminating beam mainly influences the convergence of ptychography. And the size of illuminating beam less influences directly the imaging quality and convergence. Therefore, the simulation results play an important theoretic guiding role in optimizing the beam parameters in visible light, the X-ray and electronic band and other bands.