氦质谱检漏技术的研究与实践

Studied Practices of Helium Mass Spectrometer to Leaking Detection Technology

在氦质谱检漏技术理论的基础上,采用了以微电脑为中心的自动控制技术,提高了氦质谱检漏仪的全自动操作智能化水平。180°非均匀磁场的实现,使离子聚焦更好。通过电子量程切换技术,减少了量程转换时间,扩大了测量范围,对高准确度密封性智能检测系统的实现进行了详细的研究与实践。

Introducing the theoretical basis of helium mass spectrometer to leaking detection technology,the automatic control technology is used here,which improves intelligent level and reduces the range switching time and expands the measuring range with the helps of both 180° non-uniform magnetic field for ion focus and electronic range switching.The paper gives the studied practices to high precision sealed intelligent detection system in detail.