摘要
激光诱发前向转移是基于激光的诱导作用实现微量物质转移的技术。转移过程中激光与薄膜材料发生相互作用,使薄膜从源透明基板上剥离,转移到目标基板上,发生转移的薄膜最终在目标基板上发生沉积。作为微细加工的一种手段,激光诱发前向转移技术具备制作微小结构的能力,能实现金属、有机物、半导体和生物材料等多种材料的转移和图形制作,在电子制造领域有着广阔的应用前景。
Laser Induced Forward Transfer （LIFT） technology can utilize the laser induction effect to realize transfer of microscale substances. In the process of transfer, laser beam will interact with thin film, and the film will be separated from a transparent substrate, and then the film will be transferred and deposited to a target substrate. As a method of micro fabrication, LIFT has an ability of fabricating microstructure, LIFT can realize the transfer and pattern fabrication of metal, organics, semiconductor, biological materials et al. LIFT has a broad application future in the field of electronics fabrication.
出处
《电子工艺技术》
2013年第2期70-72,78,共4页
Electronics Process Technology
基金
国家自然科学基金项目(项目编号:51005058)
关键词
激光诱发转移技术
微细加工
薄膜
电子制造
Laser induced forward transfer
Micromachining
Thin film
Electronics fabrication
