摘要
将两种纯度较高的Al2O3粉末采用等离子喷涂工艺制备成块体,其孔隙率分别达到11.2%和11.6%。用等离子喷涂工艺制备的Al2O3块体在7 GHz^18 GHz下的介电常数εr分别是7.2和7.1,介电损耗tanδ分别是3.5×10-3和1.0×10-3。用这种工艺制备的Al2O3块体的介电常数比常规压制烧结工艺制备的低,但是介电损耗大,这主要与等离子喷涂工艺所制备样品的孔隙率和微结构等有关。
Two kinds of alumina bulks were manufactured by plasma spray with high purity alumina powders. Porosity rates are up to 11.2% and 11.6%. Dielectric constants are 7.2 and 7.1, and dielectric loss are 3.5× 10^-3 and1.0×10^-3 respectively at 7 GHz - 18 GHz. The dielectric constant of plasma sprayed Al2O3 sample is lower than that of Al2O3ceramics shaped by pressing and sintering, whereas the dielectric loss is much more.These results are related to porosity rate, microstructure of samples manufactured by plasma spraying.
出处
《电子工艺技术》
2013年第2期114-117,共4页
Electronics Process Technology
基金
军工配套项目
关键词
等离子喷涂
孔隙率
介电常数
介电损耗
Plasma spray
Porosity rate
Dielectric constant
Dielectric loss
