四氯化硅加氢及其催化剂的研究进展

Research Progress on Hydrogenation of Silicon Tetrachloride and its Catalyst

综述了处理四氯化硅的方法,并对冷氢化的催化剂进行了系统的介绍,指出冷氢化是以后发展的主要方向,铁、镍催化剂是冷氢化的重点研究方向。

The methods to dispose the by-product silicon tetrachloride of poly-silicon were reviewed. Low-temperature hydrogenation was the most efficient method. The catalyst for low- temperature hydrogenation was further described in detail and the iron catalyst and nickel catalyst for low-temperature hydrogenation is the key research direction.