摘要
在真空电弧等离子喷涂设备上设计安装了超微粉的制备装置。制备出 Fe,Si,Ni,Mo,TiAl,Ti_3Al 和 Si_3N_4等超微粉。通过控制真空室工作压力和等离子弧电流,超微粉的粒度可分别为5,10,20和50nm。观察了粉的形状、分布,测试了沉积速率。
The device preparing superfine powder was designed and installed in LPPS.The superfine powders,such as Fe,Si,Ni,Mo,TiAl,Ti_3Al and Si_3N_4,were obtained by vac-uum arc plasma jet evaporation method.The size of the superfine powders are about 5,10,20 and 50nm respectively,which was controlled by vacuum chamber pressure and electriccurrent of the P.J gun.Shape and distribution of the particles were observed.The deposi-tion rate of the superfine powder was examined.
