kHz准分子激光器全固态脉冲激励源

All solid state pulse excitation source for kHz excimer laser

由于寿命制约,准分子激光器使用的传统放电开关闸流管不能满足准分子激光器高重复频率长期稳定工作运行的要求。设计了基于两级磁脉冲压缩技术的全固态脉冲功率模块,使用大功率半导体开关结合脉冲升压变压器产生μs级的高压脉冲,利用磁脉冲压缩技术将上升时间为μs级高压脉冲压缩至满足准分子激光器使用的上升时间为0.1μs级高压脉冲。在ArF准分子激光头上放电,获得激励脉冲的上升时间约为90ns,放电电压16.5kV,重复频率达到1kHz,两级磁脉冲压缩开关能量传递效率达59.1%。

Due to the constraint of thyratron life, thyratron-based excimer lasers are not available in some situation where high repetition rate is desired, such as in the ophthalmic treatment equipment. We designed a solid state pulsed power module （SSPPM） based on two-stage magnetic pulse compression technology, which uses solid-state switches and magnetic pulse com- pression to generate a high-voltage pulse of 0.1 microseconds. In discharging on the 193 nm ArF excimer laser, the rise time of the obtained excitation pulse is about 90 ns, the discharge voltage is 16.5 kV, the repetition rate is up to 1 kHz, and the overall transfer efficiency of two-stage magnetic pulse compression switches is 59.1%.