摘要
基于VMR显微镜系统,提出了一种小批量测量聚α-甲基苯乙烯(PAMS)芯轴直径和球形度的方法,初选满足技术指标的微球。小批量测量1mm标准球,测量结果95%出现在(998.2±1.2)μm之间。测量值与标准值之间的偏差为标准值的0.06%,扩展不确定度偏差为测量值的0.24%,说明该批量测量结果准确度和稳定性较好。将此方法应用于PAMS芯轴初选,与手动测量结果相比,批量测量结果的偏差具有单向性,且最大偏差约10μm,满足初选测量要求。
With the increase of capsule requirement, a method {or batch characterization of the diameter and sphericity of poly (a-methyl styrene) (PAMS) mandrels is developed based on the VMR microscope system. The sources of uncertainty in characterizing the diameter are analyzed and every uncertainty component is evaluated. The 95% results of a 1 mm standard ball are in the range of (998.2--1.2) μm to (998.2± 1.2) μm, showing excellent precision and stability of batch characterization. The characterization method is also used in measuring the PAMS mandrels. Compared with the results characterized on MM-400 microscope by hand, the deviation of the diameters of PAMS shells characterized by batch shows unidirectionality, and the maxi- mum value is about 10μm, within the requirement of 15 μm.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2013年第4期918-922,共5页
High Power Laser and Particle Beams
关键词
芯轴
小批量测量
直径
球形度
不确定度
mandrels
batch characterization
diameter
spherieity
uncertainty