直线超声电机发展概况与微小型化问题探讨

Exploration of Development and Microminiaturization of Linear Ultrasonic Motor

综述了直线超声电机的发展概况、性能特点、应用前景和存在问题.以V形直线超声电机为例,在介绍其结构、工作原理、性能特点的基础上,提出超声电机微小型化的思路和要求.指出超声电机微型化并保证综合性能的关键是研发高性能的层叠式压电陶瓷作动器,同时阐述了各种压电陶瓷低温烧结工艺及其优缺点.最后,介绍了自行研制的低温共烧层叠式压电陶瓷作动器及基于该种压电陶瓷的V形直线超声电机的性能与特点.

This paper reviews the development, performance, characteristics, application propspect and problems of linear ultrasonic motor. Based on the introduction of the composition, operational principle and characteristics of V-shaped linear ultrasonic motor, the miniaturization of the ultrasonic motor is suggested. It proposes that the development of highly efficient multi-layered piezoceramic actuator is a key to the miniaturization and to ensuring comprehensive properties of ultrasonic motor. A number of low temperature sintering processes and their advantages and disadvantages are discussed. Finally introduced are the performances and special features of self-developed low temperature co-sintering multilayered piezoceramic actuator and self developed V-shaped linear ultrasonic motor.