超声电机微纳驱动参数调节机构设计

Design on Adjusting Mechanism for Micro/Nano-Actuation Parameters of Ultrasonic Motor

为解决超声电机驱动轨迹及微行程纳米定位的可控问题,设计了一种基于双压电陶瓷驱动的调节机构,将双压电陶瓷驱动与超声电机驱动轨迹及微行程纳米定位控制关联起来,并利用ANSYSWorkbench有限元分析软件对调节机构进行了分析。通过对双压电陶瓷施加0～54V调节电压的实验,证实了调节机构能够使超声电机驱动头在x和y两个方向上获得所需的微纳米调节功能,调节范围为,x方向±1.2～±2.36μm,y方向±4.0μm,调节分辨率1～2nm,满足超声电机对驱动轨迹及微行程纳米定位的参数控制要求。

To improve the controllability of locus and micro--displacement adjustment for nanopo- sitioning of ultrasonic motor, an adjusting mechanism based on double PZT was designed to establish the relation of double PZT control with the locus control and mirco--displacement control of ultrason- ic motor and the structure of adjusting mechanism was analyzed by finite element software of ANSYS Workbench. The experiments show that, when 0~54V control voltage is exerted on double PZT, the adjusting mechanism can realize ±1.2μm up to ±2.36μm displacement adjustment in x direction and ±4.0μm displacement adjustment in y direction with 1 ~ 2nm resolution of ultrasonic motor head, which meets the requirements of ultrasonic motor for locus control and micro--displacement control for nanopositioning.