摘要
针对全面单向垂直流的洁净室内的气流偏移现象进行综合分析,探讨在洁净室施工图深化设计中所要考虑的因素以及气流二次调整的典型方案,使洁净室形成较好的气流流型并能更好的满足实际生产的需要。
An analysis of unidirectional vertical air flow in clean room which will skew random. Discuss the major is- sues should be considered and typical adjustment plan of air flow in detail design stage, so that suitable air flow could be got to meet the production requirement.
关键词
洁净室
气流组织
室压
微环境
clean room
air flow
indoor pressure
mini environment
