一种新型光谱共焦位移测量系统研究

Research on a novel displacement measurement system of spectrum confocal

设计并搭建了一种光谱共焦位移测量系统。利用高斯拟合算法拟合每组实验数据,获取光谱响应曲线峰值对应的光波长值,采用Levenberg-Marquardt算法优化求解高斯函数的参数向量;利用双频激光干涉仪对系统进行标定,获得光波长和反射镜位移之间的对应关系;对整个系统作精度分析。实验结果表明:高斯拟合算法适合作为该位移测量系统的数据处理方法;用双频激光干涉仪对系统标定的方法能够准确定位反射镜的位置。该设计系统的测量范围为20 mm,测量精度为10μm,能够满足一定精度的测量要求。

A displacement measurement system of spectrum confocal is designed and set up. Gaussian fitting algorithm is used to fit every group of experimental data to obtain corresponding optical wavelength of the peak of spectral response curve. The Levenberg-Marquardt algorithm is used to solve parameter vector of Gaussian function. The system is calibrated by using dual-frequency laser interferometer to find corresponding relationship between optical wavelength and displacements of the reflecting mirror. Precision analysis is carried out on overall system. The experimental resuhs show that Gaussian fitting algorithm is suitable for acting as data processing method of the measurement system, and the calibrating method by dual-frequency laser interferometer can accurately locate position of reflecting mirror. Measurement range of the designed system is 20 mm, measurement precision can reach 10mm, which can satisfy measurement requirements for certain precision.