摘要
阐述了具有温度补偿结构的膜片型光纤光栅温度压力传感器。传感器以弹性膜片为感压元件,在压力作用下产生轴向位移来压缩压力敏感光栅以实现压力传感;通过结构温度补偿消除压力敏感光栅的温度漂移,同时串入感温光栅进行实时修正并实现温度测量。对传感器的压力和温度特性进行了测量。试验结果表明:压力灵敏度为528 pm/MPa,温度灵敏度为8 pm/℃。
Optical fiber grating temperature and pressure sensor based on diaphragm with temperature compensation is described. Elastic diaphragm acts as pressure sensing element, axial displacement occurs under pressure and compress pressure sensing grating to realize pressure sensing. Temperature compensation and active correction by add another temperature grating are adopted simultaneously to eliminate the thermal errors for the pressure grating. Besides, the temperature grating also is used for measuring temperature. Pressure and temperature characteristics of the sensor are measured. The experimental result shows that pressure sensitivity is 528 pm/MPa and temperature sensitivity is 8 pm℃.
出处
《传感器与微系统》
CSCD
北大核心
2013年第4期98-100,共3页
Transducer and Microsystem Technologies
关键词
光纤光栅
压力传感器
弹性膜片
温度补偿
optical fiber grating
pressure sensor
elastic diaphragm
temperature compensation
