软X光激光In衰减膜的制备及测量

Preparation and Surface Research of Indium Soft X-ray Laser Attenuation Foil

通过对制备工艺的摸索 ,制备出用于软X光激光实验的In衰减膜 ;利用α能谱测厚仪对In衰减膜的质量厚度进行了测量 ;通过俄歇电子谱并结合Ar离子刻蚀对In膜表面氧化及氧元素质量分数的深度分布进行了分析 .

Through the study of the technology, the attenuation indium foil for soft X-ray laser experiment was fabricated. The mass thickness of the In attenuation foil was measured by a vacuum α thickness measurement apparatus. The surface oxidizing of indium attenuation foil was studied through Auger electronic spectrum combined with Ar ion beam etching.