罐形磁芯法测量软磁薄膜复数磁导率的研究

Study of Measuring Complex Permeability of Soft Magnetic Film by Jug shaped Magnetic Core Method

介绍了罐形磁芯法测量软磁薄膜材料磁导率的磁路结构原理 ;根据磁路磁通分布 ,给出了计算的等效磁路 ;推导了复数磁导率的计算表达式 ;利用罐形磁芯法在阻抗分析仪上测量了几种软磁薄膜样品的复数磁导率 ,并与冲击法的实验结果做了比较 ,获得了较为一致的结果 .

The basic principle of m easuring permeability of soft magnetic thin films by Jug shaped magnetic method is reported. In this method the closed magnetic circuit is composed of a thin f ilm and a jug shaped magnetic core. By analyzing the flux distribution and leak age in the magnetic core, an equivalent magnetic circuit for calculating mag netic reluctance of the magnetic circuit is presented. The formulas for calculat ing complex permeability of thin films have been obtained from it. By this metho d the permeabilities of two kinds of Fe Ta N nanocrystallite soft magnetic thi n films were measured with HP 4291A impedance analyzer, and checked with a sens itive flux meter. It is found that the results are agreeable, and that the jug shaped magnetic core method is an easy, valid and feasible way in measuring perm eability of soft magnetic thin films.