基于肖特基势垒二极管的太赫兹固态倍频源和检测器研制

Development of Terahertz Frequency Solid State Multiply Sources and Sensors with Schottky Barrier Diodes

本文基于GaAs肖特基势垒二极管以及混合集成电路工艺,对太赫兹固态倍频和检测技术开展了研究.文章结合肖特基势垒二极管物理结构,采用电磁场仿真软件和电路仿真软件相结合的综合分析方法,对各模块电路进行优化设计,研制出了高倍频效率的倍频源和高灵敏度的检测器(检波器和谐波混频器).0.15THz检波器测得最高检波电压灵敏度1600mV/mW,在0.11～0.17THz灵敏度典型值为600mV/mW,切线灵敏度优于-29dBm.0.15THz二倍频器测得最高倍频效率7.5%,在0.1474～0.152THz效率典型值为6.0%.0.18THz二倍频器测得最高倍频效率14.8%,在0.15～0.2THz效率典型值为8.0%.0.15THz谐波混频器测得最低变频损耗10.7dB,在0.135～0.165THz变频损耗典型值为12.5dB.0.18THz谐波混频器测得最低变频损耗5.8dB,在0.165～0.2THz变频损耗典型值为13.5dB,在0.21～0.24THz变频损耗典型值为11.5dB.

Terahertz solid state frequency multiplying sources and sensors are developed with GaAs Schottky barrier diodes and hybrid integrated circuit process.Based on physical structure of diode,high efficiency multipliers,and high sensitivity sensors,such as detectors and subharmonic mixers（SHM） are developed with the combination of electromagnetic（EM） full-wave tool and circuit simulation tool.To the 0.15THz detector,highest measured voltage sensitivity is 1600mV/mW,typical sensitivity is 600mV/mW in 0.11～0.17THz,and tangential signal sensitivity（TSS） is superior than-29dBm.To the 0.15THz frequency doubler,highest measured multiply efficiency is 7.5%,and typical efficiency is 6.0% in 0.1474～0.152THz.To the 0.18THz frequency doubler,highest measured multiply efficiency is 14.8%,and typical efficiency is 8.0% in 0.15～0.2THz.To the 0.15THz SHM,lowest measured conversion loss is 10.7dB,and typical conversion loss is 12.5dB in 0.135～0.165THz.To the 0.18THz SHM,lowest measured conversion loss is 5.8dB,and typical conversion loss is 13.5dB and 11.5dB in 0.165～0.2THz and 0.21～0.24THz,respectively.