多元靶溅射的暂态过程理论

Transient state theory of multi-component target sputtering

发展了J M Mayer等人建立的两元靶溅射的暂态理论 ,清晰地给出了描述因离子束轰击诱导多元靶表面化学成分随离子通量变化的公式 .根据稳定态时化学成分的改变 ,可以推算出靶中任意两元素表面结合能之比 .利用Schiott理论 ,可以计算多元靶中的离子射程 ,从而可以很简单地求出多元靶表面化学成分随轰击离子通量的动态变化过程 ,亦即暂态过程 .作为例子 ,作者计算了某些真实的两元和三元合金靶的暂态过程 ,结果显示出计算曲线和实验曲线符合得很好 .

The authors have developed the transient state theory proposed by J.M.Mayer and some others for a binary target,and clearly provided a formula for the chemical composition change of a multi_component target surface bombarded by energetic ion as a function of the ion flux until the steady state established.According to the surface chemical composition change of the steady state,the surface binding energy ratios between any two elements in the target can be evaluated.By Schiott′s theory,the ion range in a multi_component target can be calculated.Therefore,the dynamic process of the surface chemical composition of a multi_component system can be computed simply as a function of the ion flux,i.e.transient state.As examples, authors have calculated the transient state for some real binary and ternary systems and demonstrated that our calculated curves agree the experimental curves very well.