气膜介电常数与供气压力的相关性实验研究

Research on the correlations between permittivity of the air-film and atmospheric pressure supplied

基于电容法测量气体静压导轨气膜厚度的原理,进行供气压力与气膜介电常数相关性的研究。实验结果表明,环境条件不变的情况下,供气压力范围在0.1～0.48MPa之间,气膜介电常数与供气压力呈显著负相关并符合4阶多项式关系,拟合决定系数R2均大于0.94,该结果为气体静压导轨气膜精准电容模型的建立提供了依据。

Research on the correlations between permittivity of the air-film and atmospheric pressure applied is done based on capacitive testing method of the air-film thickness. Results illustrate that permittivity has significant negative correlation with atmospheric pressure which varies from 0.1MPa to 0.48MPa when other environmental conditions remain unchanged. They conform to the fourth-order polynomial and the value of R2 square is beyond 0.94. This result provides a basis for establishing accurate airfilm capacitance model of aerostatic bearing.